• Radial Line Slot Antenna Plasma Tv
• Radial Line Slot Antenna Plasma Cutter

Large-area plasma excitation in densely arrayed radial line slot antennas using TE11 rotating mode

Abstract

Radial Line Slot Antenna Plasma Tv

Radial Line Slot Antenna Plasma Cutter

In slot antenna (SLAN) type plasma sources the microwave power is coupled from an annual waveguide (ring cavity) through equidistantly positioned resonant. The antenna aperture in this case. A radial line slot antenna (RLSA) for surface-wave-coupled plasma (SWP) is a promising candidate to this end. A novel slot arrangement in the aperture, consisting of densely arrayed transverse slots, was fabricated. A radial line slot antenna (RLSA) is a slotted waveguide planar array proposed for DBS subscriber antennas. Predicted conductor loss of RLSA is almost negligible. A single-layered RLSA (SL-RLSA) has the simplest structure. The slot plate 40 is a substantially circular metal plate having a multiple number of slot pairs. The antenna 14 is implemented by, for example, a radial line slot antenna. 2 is a plan view illustrating an example of the slot plate 40. The slot plate 40 is provided with a multiple number of slot pairs 40a, as shown in FIG.

A novel feeding structure using a TE11 (transverse electric) rotating mode in a radial line slot antenna for plasma production is proposed. Moreover, novel slot patterns with different coupling slot distributions are fabricated and tested. Extremely uniform plasma over a large diameter is observed and the possibility of control of the plasma distribution in the radial direction by changing to different coupling slot distributions is verified.

Publication:

Pub Date:

June 2004

DOI:

10.1139/p04-019

Bibcode:

2004CaJPh..82..489Y